طراحی گیج خلأ یونی کاتد گرم به‌صورت آرایه مبتنی بر MEMS

[1] L. Zhang, B. Jiao, S. Yun, Y. Kong, C. Ku and D. Chen, "A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks," Journal of Chinese Physics Letters, vol. 34, no. 2, pp. 025101(1-4), 2017.

[2] S. M. Piotto, S. D. Cesta and P. Bruschi, "A Compact CMOS Compatible micro-Pirani Vacuum Sensor with Wide Operating Range and Low Power Consumption," Journal of Procedia Engineering, vol. 168, pp. 766-769, 2016.

[3] F. Zhang, Y. Zhen, B. Tang, W. Su and Z. Tang, "Design and Fabrication of High Vacuum Gauge Based on Micro Hotplate," Trans Tech Publications, vol. 645, 2015.

[4] F. O. Hanlon, User's Guide to Vacuum Technology, john Wiley and sons, Newyork, 2004.

[5] MKS instrument Inc., Tecknical Brochure of 999 Quattro multisensor vacuum transducer, https://www.mksinst.com/docs/ur/pin999.aspx.

[6] MKS instrument Inc., Series 943 operation and maintenance manual cold cathode Vacuum Sensor System,

https://www.mksinst.com.

[7] T. Grzebyk and A. G. Drzazga, "MEMS type ionization vacuum sensor," Journal of Sensors and Actuators A, Physical, vol. 246, pp. 148-155, 2016.

[8] Stanford research Systems, Bayard-Alpert Ionization Gauges, http://www.thinksrs.com.

[9] J. Q. Wang and J. Yu, "Fabrication Process and Electro-Thermal Modeling for the Cathode of the CMOS-Compatible Hot-Filament Vacuum Gauge", Key Engineering Materials, vol. 645-646, pp. 836-840, 2015

[10] S. M. Bazarchi , E. A. Sani, “Micromachined Ionization Vacuum Gauge and Improve its Sensitivity with Magnetic Field,” Eurasian Journal of Analytical Chemistry, vol.12(7b), pp. 1137-1151, 2017

[11] Stanford research Systems, Bayard-Alpert Ionization Gauges, http://www.thinksrs.com.

[12] T. Grzebyk, A. G. Drzazga and J. A. Dziuban, "Glow-discharge ion-sorption micropump for vacuum MEMS," Journal of Sensors and Actuators A: Physical, vol. 208, pp. 113-119, 2014.

[13] S. Suginuma, M. Hirata and T. Kobata, "Simulation of Relative Sensitivity Coefficient of Bayard-Alpert Gauge," Journal of the Vacuum Society of Japan, vol. 59, no. 6, pp. 156-159, 2016.

[14] Y. K. Kim and J. P. Desclaux, "Ionization of carbon, nitrogen, and oxygen by electron impact," Journal of Physical Review A, vol. 66, no. 1, pp. 66 012708(1-12) ,2002.

[15] T. Grzebyk, A. G. Drzazga, J. A. Dziuban and K. Maamari, "Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge," Journal of Vacuum Science & Technology B, vol. 33, no. 3, pp. 03C103(1-6), 2015.

[16] MKS instrument Inc., shrinking thepirani vacuum gauge, http://www.johnmorris.com.au.

[17] Talking electronics, Electron Emission, http://www.talkingelectronics.com.

[18] Electronic cooling, The Thermal Conductivity of Air at Reduced Pressures and Length Scales, https://www.electronicscooling.com.

[19] B. David, Introduction to Gas Discharges, University of Notre Dame, Notre Dame ,2012.

[20] Keysight Technologies, Femto Picoammeter and Electrometer High Resistance Meter, https://www.amplicon.com.

[21] Electronic Afzar Azama, pico Amperemeter, http://www.irannano.org

[22] K. Tämm, C. Mayeux , L. Sikk , J. F. Gal and P. Burk, "Theoretical modeling of sensitivity factors of Bayard-Alpert ionization gauges," Journal of International Journal of Mass Spectrometry, vol. 341-342, pp. 52-58, 2013.

[23] Y. Itikawa, "Cross Sections for Electron Collisions with Nitrogen Molecules," Journal of Physical and Chemical Reference Data, vol. 35, no. 1, pp. 31-53, 2006.

[24] MKS instrument inc., Mini Ion Gauge (MIG), Hot Cathode Ionization Pressure Vacuum Sensor, https://www.mksinst.com.

[25] B. Razavi, RF Microelectronics, 2nd Edition, Prentice Hall, 2011.

[26] علیرضا شمسی، سعید دلآرام فریمانی و احمد عفیفی، «استفاده از روش لیتوگرافی نرم جهت ایجاد میکروساختارها روی بستر آب‌دوست شده پلیمر،»  مجله مهندسی برق دانشگاه تبریز، دوره 46, شماره 2,صفحات 133-127, 1395